Forced vibration analysis of variable thickness microplate

  • Dam Vu Son Quyen

    Institute of Technology, Vietnam Defense Industry, Dong Ngac ward, Hanoi, Vietnam
Email: damvusonquyen@gmail.com
Từ khóa: Dynamic response, variable thickness, functionally graded material, microplate, isogeometric analysis.

Tóm tắt

Nowadays, with the development of material science, nano- or microstructures are increasingly of interest in research because of their applications in micro-electromechanical technology, semiconductor chips, or sensors. In this study, the isogeometric approach (IGA) method combining the Mindlin plate hypothesis and the modified couple stress hypothesis is used to analyse the forced vibration of a micro-plate with variable thickness made of materials with variable mechanical characteristics subjected to the effect of different types of dynamic loads. The thickness change of the microplate is considered in two directions with a nonlinear law, while the material characteristics vary with the plate thickness. The model's and method's accuracy are validated by comparing it with results from published studies. Then, the paper surveys the impact of geometric and material coefficient on the transient responses of FG microplate. The research results provide important bases in the design and optimization calculation of micro-electromechanical systems serving the chip and sensor industries.

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